Patent

• September 21, 2023

  No. 10-2583016

  MgO-Based Electrostatic Chuck (ESC) and Method for Manufacturing the Same

• July 27, 2020

  No. 10-2140366

  Ceramic Heater Having an RF Rod Coupled with a Compression Spring

• June 19, 2019

  No. 10-1993110

  Method for Manufacturing High-Purity Electrostatic Chuck (ESC) via Pressure Bonding and the Resulting ESC

Government-Funded Projects

No	Project Category	Research Task	Period	Supporting Agency
1	Purchase Conditioned R&D Grant Project	Development and Commercialization of ESC for Sputtering Processes Featuring High Uniformity and Precision Control on Semiconductor Substrates	2022. 07 ~ 2024. 06
2	Regional Cooperation Industry Fostering Project	Ceramic Membranes for Water Treatment & Performance Enhancement of Carbon Nanotubes (CNTs) for Supercapacitors Using Titanium Oxide	2020. 02 ~ 2020. 07
3	Ceramic Industry Ecosystem Development Project	Fabrication of 12-inch Electrostatic Chuck (ESC) Prototypes Using Glass Coating Methods for PVD Processes	2019. 10 ~ 2020. 02
4	Startup Leader University Fostering Project	Development of an Electrostatic Chuck (ESC) Plate for Wafer Clamping with Enhanced Plasma Resistance Using 99.9% High-Purity, High-Density Ceramic Materials	2018. 09 ~ 2019. 03