Repair process
-
Step.01
Pre-Inspection
Visual Inspection
Dimensional Measurement
Electrical Property Test
Ultrasonic Testing -
Step.02
Repair Level Setting
L1 : Bellows Welding (Option: SUS Shaft Welding)
L2 : Embossing PAD Re-coating + LEVEL1
L3 : Electrode Layer Replacement + Level 2
L4 : Ceramic Puck Replacement + Level 2
-
Step.03
Advanced Repair Workflow
System Diagnosis
Material Assessment
Pre-Treatment
Execution -
Step.04
Product Cleaning
Blast Cleaning
Embo Patterning
Chemical Cleaning
Dry Cleaning -
Step.05
Quality Assurance
Visual Inspection & Dimensional Measurement Electrical Property Test
Ultrasonic Inspection
Thermal Uniformity Test
Inspection Report
-
LEVEL 1 (L1)
Bellows Welding (Option: SUS Shaft Welding)
-
LEVEL 2 (L2)
Embossing PAD Re-coating + LEVEL1
-
LEVEL 3 (L3)
Electrode Layer Replacement + level 2
-
LEVEL 4 (L4)
Ceramic Puck Replacement + Level 2
-
NEW Development Inquiry


| PRECESS | PARTS NUMBER | SIZE |
|---|---|---|
| PVD | 0010-01286 | 200㎜ |
| PVD | 0010-01925 | 200㎜ |
| PVD | 0010-03254 | 200㎜ |
| PVD | 0010-15961 | 200㎜ |
| PVD | 0190-21764 | 200㎜ |
| PVD | 0010-27430 | 300㎜ |
| PVD | 0010-23066 | 300㎜ |
| PVD | 0010-07815 | 300㎜ |
| PVD | 0010-22985 | 300㎜ |
| PVD | 0010-27431 | 300㎜ |
| PVD | 0010-27983 | 300㎜ |
| PVD | 0010-49223 | 300㎜ |
| PVD | 0010-50943 | 300㎜ |
| PVD | 0010-24456 | 300㎜ |
| PVD | 0010-31581 | 300㎜ |
| PVD | 0010-33488 | 300㎜ |
| PVD | 0190-00382 | 200㎜ |
| PVD | 0010-22411 | 200㎜ |
| PVD | 0010-21764 | 200㎜ |
| PVD | 0010-21759 | 200㎜ |
| PVD | 0010-21758 | 200㎜ |
| PVD | 0010-17831 | 200㎜ |
| PVD | 0010-17812 | 200㎜ |
| PVD | 0010-13897 | 200㎜ |
| PVD | 0010-13895 | 200㎜ |
| PVD | 0010-12516 | 200㎜ |
| PVD | 0010-08750 | 200㎜ |
| PVD | 0010-04450 | 200㎜ |
| PVD | 0010-03366 | 200㎜ |
| PVD | 0010-01926 | 200㎜ |
| PVD | 0010-01166 | 200㎜ |
| PVD | 0010-00381 | 200㎜ |






