Repair process
-
Step.01
Pre-Inspection
Visual Inspection
Dimensional Measurement
Electrical Property Test
Ultrasonic Testing -
Step.02
Repair Level Setting
L1 : Surface Treatment
L2 : Re-bonding + L1
L3 : New Plate + L2
LEVEL 4(L4): L3+Heater -
Step.03
Advanced Repair Workflow
System Diagnosis
Material Assessment
Pre-Treatment
Execution -
Step.04
Product Cleaning
Blast Cleaning
Embo Patterning
Chemical Cleaning
Dry Cleaning -
Step.05
Quality Assurance
Visual Inspection & Dimensional Measurement Electrical Property Test
Ultrasonic Inspection
Thermal Uniformity Test
Inspection Report
-
LEVEL 1 (L1)
Surface Treatment
-
LEVEL 2 (L2)
Re-bonding+L1
-
LEVEL 3 (L3)
New plate+L2
-
LEVEL 4 (L4)
L3+Heater(Under Development)
-
NEW Development Inquiry
GLASS coated chuck
Plasma Spray coated chuck
Ceramic Plate ESC
| PRECESS | PARTS NUMBER | SIZE |
|---|---|---|
| Etch | 0010-16392 | 300㎜ |
| Etch | 0040-39990 | 200㎜ |
| Etch | 0040-45164 | 200㎜ |
| Etch | 0190-23942 | 300㎜ |
| Etch | 0041-26723 | 300㎜ |
| Etch | 0041-09247 | 300㎜ |
| Etch | 0010-47763 | 300㎜ |
| Etch | 0010-50850 | 300㎜ |
| Etch | 0010-56651 | 300㎜ |
| Etch | 0041-64761 | 300㎜ |
| Etch | 0040-77771 / 019-07958 | 200㎜ |
| Etch | 839-440462 | 200㎜ |
| Etch | 839-800327-315 | 300㎜ |
| Etch | 839-019090-324 | 300㎜ |
| Etch | 839-019090-328 | 300㎜ |
| Etch | 839-019090-374 | 300㎜ |
| Etch | 839-800327-385 | 300㎜ |
| Etch | 839-800327-4XX | 300㎜ |
| Etch | 839-800327-577 | 300㎜ |
| Etch | 839-019090-608 | 300㎜ |
| Etch | 839-019090-611 | 300㎜ |
| Etch | 839-102001-136 | 300㎜ |
| Etch | 839-102001-069 | 300㎜ |
| Etch | 3D10-10388-11 | 300㎜ |
| Etch | 2L10-150079-13 | 300㎜ |
| Etch | 2L10-151441-11 | 300㎜ |
| Etch | 1D10-100956-12 | 300㎜ |
| Etch | 2-821454-XD | 200㎜ |
| Etch | 2-826194-XC | 200㎜ |
| Etch | 1A1380001 | 300㎜ |
| Etch | 15-270165-00 | 300㎜ |
| Etch | 02-293830-00 | 300㎜ |
| Etch | 02-142398-00 | 300㎜ |