Low Resistivity Material
| PROPERTIES | UNIT | Low R | AT | MAY |
|---|---|---|---|---|
| Al2O3 Purity | % | Al2O3 (80%) | Al2O3 (99%), TiO2 | MgO-Al2O3-Y2O3 (Anti-plasma material) |
| Color | - | Black | Black | Black |
| Density | g/㎤ | 4.0 | 3.85 | 3.6 |
| Thermal Conductivity |
W/m·K | 11 | 25 | 50 |
| CTE | x10-6/℃ (25~400℃) |
7.5 | 7.0 | 8.5 |
| Flexural Strength (4 point) |
㎫ | 300 | 350 | 300 |
| Vickers Hardness | HV | 1000 | 1400 | 900 |
| Dielectric Constant | ㎒ | 10 | 9.0 | 15 |
| Volume Resistivity (25℃) |
Ω·cm @ 500V | E7~E8 | E10 | E9~E11 |
Microstructure
X1000
Porous material
| PROPERTIES | DATA | |
|---|---|---|
| Materials | Al2O3, SiO2 | |
| Purity (%) | 90 | |
| MECHANICAL | Density (g/㎤) | 1.8 |
| Bending Strength (㎫) | 53 | |
| ELECTRICAL | Surface Resistivity(Ω/□) | 1.0E9 |
| THERMAL | Thermal Expansion coefficient (㎝/℃) | 7.6 (20~800℃) |
| Thermal Conductivity (W/m·K) | 2.2 (20℃) |
|
BLACK POROUS (#120)
BLACK POROUS (#800)
White porous Properties & Size
| ITEM | USE | COLOR | PURITY(%) | AVG. Pore Size(㎛) | POROSITY (%) |
|---|---|---|---|---|---|
| WP-1000C | CHUCK | WHITE | 97% | 15 | 30 |
| WP-220C | CHUCK, FILTER | WHITE | 97% | 50 | 35 |
| WP-120F | FILTER | WHITE | 92% | 70 | 35 |
White porous Microstructure
Porous/Dense Filter Image
Plate manufacturing
| Method | Green Sheet Laminating Method (L608) | Glass Bonding Method (DPS & RING) | Hot Pressing Bonding Method (L136, 069) |
|---|---|---|---|
| Process |  |
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| Cross-section Image |
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| Merits |
Invisible laminated Take the advantageous point for multiple properties (Heater+ESC) |
Using a High Purity Al2O3 - Low Pore size & amount
- High Chucking Force - High anti-plasma |
99.9% Al2O3 (Ultra-high Purity) - Maximum Anti-plasma property
- OXIDE Process (High RF power) - POLY Process (Toxic Gas) |
Plasma-resistant materials can be applied : 99.99% Al2O3, MAY material